Abstract— The micro-features are employed in a wide range of applications like Lab on a chip (LOC), micro Total
Analytic Systems (µTAS), Textured hydrodynamic bearings, Micro Heat Sinks, etc. The fabrication of
microfeatures is a critical task. This paper focuses on the fabrication and characterization of micro features using CO2 Laser
machining. The three micro feature shapes are considered in the study viz. circular, square, and hexagonal. The size of the
microfeatures has been varied from 300 µm to 1000 µm with an interval of 100 µm. The micro-features have been fabricated on
polymethylmethacrylate (PMMA) material. The experiments have been performed to study the effect of process
parameters (power, scanning speed) on the surface roughness and the dimensions. The characterization has been
performed using RAPID I Vision 5 Microscope and Mitutoyo surface roughness tester.
Further, the straight channels also have been fabricated with a width varying from 300 µm to 1000 µm with an interval of
100 µm. The characterization of the straight channels has been carried out. The fabricated channels are observed to be
in agreement with the required dimensions. Thus, CO2 laser machining is capable of fabrication the straight channels and
micro features which have a significant application for the fabrication of mold in soft lithography.